Описание

Ключевые возможности и технические характеристикиGeneral
  • Maximum velocity with linear optics: 1.2 m/s
  • Reference frequency: >= 4.4 MHz , option 300: 5 MHz available
  • Weight: 3.2 kg (7 lb)
  • Warm up time: 45 minutes if fan and exhaust connected to the vented cover
Laser Beam
  • Diameter: 6 mm , option 009: 9mm available
  • Minimum output power: 180 µ,W (120 µ,W after 3 years), option 300: 80 uW (50 uW after 3 years)
  • Maximum output power: 1 mW, option 300: 220 uW
  • Beam height: 80.8 ± 1.0 mm
Input Power Requirement
  • +15 V ± 0.3 V at 3.0 A maximum
  • -15 V ± 0.3 V at 0.3 A maximum
ОписаниеThe Keysight 5517DL is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Please contact Keysight for custom requirements.Learn more about Laser Interferometer Position Measurement Systems''